JPS6234246Y2 - - Google Patents
Info
- Publication number
- JPS6234246Y2 JPS6234246Y2 JP17360480U JP17360480U JPS6234246Y2 JP S6234246 Y2 JPS6234246 Y2 JP S6234246Y2 JP 17360480 U JP17360480 U JP 17360480U JP 17360480 U JP17360480 U JP 17360480U JP S6234246 Y2 JPS6234246 Y2 JP S6234246Y2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- light
- diffracted light
- spindle
- reader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17360480U JPS6234246Y2 (en]) | 1980-12-03 | 1980-12-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17360480U JPS6234246Y2 (en]) | 1980-12-03 | 1980-12-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5797211U JPS5797211U (en]) | 1982-06-15 |
JPS6234246Y2 true JPS6234246Y2 (en]) | 1987-09-01 |
Family
ID=29531806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17360480U Expired JPS6234246Y2 (en]) | 1980-12-03 | 1980-12-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6234246Y2 (en]) |
-
1980
- 1980-12-03 JP JP17360480U patent/JPS6234246Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5797211U (en]) | 1982-06-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5046780B2 (ja) | 光エンコーダ | |
JP3210111B2 (ja) | 変位検出装置 | |
JP2586120B2 (ja) | エンコーダー | |
JP2862417B2 (ja) | 変位測定装置及び方法 | |
JP3254737B2 (ja) | エンコーダー | |
JP2764373B2 (ja) | 多座標測定装置 | |
JPH03279812A (ja) | 回析干渉型エンコーダ | |
JPH02206745A (ja) | 屈折率測定用高安定性干渉計 | |
JPH046884B2 (en]) | ||
JPS6234246Y2 (en]) | ||
JPS632323B2 (en]) | ||
JPS6128923B2 (en]) | ||
JPS59163517A (ja) | 光学式スケ−ル読取装置 | |
JPS6234244Y2 (en]) | ||
JPH0599638A (ja) | 測角装置 | |
JPS6234243Y2 (en]) | ||
EP0486050B1 (en) | Method and apparatus for measuring displacement | |
JPH1038516A (ja) | ステージの垂直方向変位測定装置 | |
JPS6244332Y2 (en]) | ||
JPS6213603B2 (en]) | ||
JPS6122243Y2 (en]) | ||
JPS6234242Y2 (en]) | ||
JPS6210641Y2 (en]) | ||
JP2675317B2 (ja) | 移動量測定方法及び移動量測定装置 | |
JPH0151926B2 (en]) |